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drylin® linear guides in the clean room

drylin® cleanroom suitability, ESD compatibility and RoHS

The tested drylin® guides are clearly suitable for cleanrooms. The individual cleanroom classes must be observed here depending on the speed and load. The combination of iglidur® J against anodised and hard-anodised aluminium has "Level 1" in ESD compatibility according to SEMI E78-0998 (best rating).

All drylin® linear guides are designed for dry operation and have also been tested in this condition. No oils or greases have been used as additional lubricants.

IPA qualification certificate

The guidance systems specified in the certificate comply with RoHS requirements and Directive 2011/65/EU.

The following drylin® guides from igus® were analysed: N40, W10, T25 and T30.

Linear guide system drylin® NK-02-40-02
"For the linear guide drylin® NK-02-40-02 from igus® GmbH, a clear suitability for cleanrooms of ISO class 6 according to DIN EN ISO 14644-1 can be derived from the respective calculations of the limit value exceedance probability of the detection variables 0.2μm, 0.3μm, 0.5μm and 5μm at a travel speed v = 1m/s."
The measurement results for ESD compatibility in accordance with SEMI E78-0998 show that the drylin® linear guide systems NK-02-40- 02 can be categorised as suitable for "Level 1". Fraunhofer IPA Report No.: IG 0308- 295 73

Linear guide system drylin® TK-01-30-01
"For the linear guide drylin® TK-01-30-01 from igus® GmbH, a clear suitability for cleanrooms of ISO class 3 according to DIN EN ISO 14644-1 can be derived from the respective calculations of the limit value exceedance probability of the detection variables 0.2μm, 0.3μm, 0.5μm and 5μm at a travel speed v = 0.1m/s."

Linear guide system drylin® TK-01-25-02
"For the linear guide drylin® TK-01-25-02 from igus® GmbH, a clear suitability for cleanrooms of ISO class 5 according to DIN EN ISO 14644-1 can be derived from the respective calculations of the limit value exceedance probability of the detection variables 0.2μm, 0.3μm, 0.5μm and 5μm at a travel speed v = 1m/s."
The measurement results for ESD compatibility in accordance with SEMI E78- 0998 show that the drylin® linear guide systems TK-01-25-02 can be categorised as suitable for "Level 1".

Linear guide system drylin® WK-10-40-15-01
"For the linear guide drylin® WK-10-40-15-01 from igus® GmbH, a clear suitability for cleanrooms of ISO class 6 according to DIN EN ISO 14644-1 can be derived from the respective calculations of the limit value exceedance probability of the detection variables 0.2μm, 0.3μm, 0.5μm and 5μm at a travel speed v = 1m/s."
The measurement results for ESD compatibility in accordance with SEMI E78- 0998 show that the drylin® linear guide systems WK-10-40- 15-01 can be categorised as suitable for "Level 1". Fraunhofer IPA Report No.: IG 0308-295 74